Flat Panel Display (FPD) Lithography Equipment
FPD Lithography Equipment MPAsp Series
Canon MPAsp Series Mirror Projection Mask Aligners typify Flat Panel Display (FPD) Lithography Equipment utilizing mirror projection technology. MPAsp Series FPD equipment are compatible with a variety of functions and technologies that enable panel process mass production and future improvements.
Canon has a lineup of Lithography Equipment for array plate, color filter and other panel exposure applications and continues to support MPAsp series FPD equipment by developing new functions & panel exposure productivity improvements.